Holota V. The field emission microcathodes with control elements on "silicon-on-insulator" structures.

Українська версія

Thesis for the degree of Candidate of Sciences (CSc)

State registration number

0409U002437

Applicant for

Specialization

  • 05.27.01 - Твердотільна електроніка

29-04-2009

Specialized Academic Board

Д 35.052.12

Lviv Polytechnic National University

Essay

The field emission silicon microcathodes with control elements on "silicon-on-insulator" structures are presented. Fowler-Nordheim's equation is extended in order to calculate semiconductor's field emission. The calculation methods of the microcathode electronic optics are improved. Control circuit of microcathode and layout are developed. The method of localised 3D structures manufacturing is developed and examples of their application are shown. Calculated and experimentally obtained characteristics of test structures are compared.

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