Marynenko О. Physical-chemical processes during manufacturing of big-size solar cells under the conditions of batch production

Thesis is devoted to the complex study of the physical-technology processes of manufacturing the big-size solar cells based on crystalline silicon under the conditions of batch production. The study of influence upon the solar cells efficiency has been carried out which refers to: 1) output silicon wafers parameters; 2) textured surface parameters (influence of the textured surface parameters not only upon the short circuit current density, but on the series resistance of solar cells as well has been shown); modes of formation of emitter ball (substantial differences from the classical Fik theory as well as dependence of balls parameters upon the wafer surface treatment condition have been established, recommendations for emitter ball formation modes have been given); 4) ARC film formation conditions (for improvement of the near-surface ball conditions the usage of processing wafers in the ammonia plasma has been proposed which improves passivation of the solar cells surface). The theoretical and practical results of the isotype junction formation mechanism study have been demonstrated. The proposed physics-technology processes and means of their optimization made it possible to obtain efficiency for solar cells with size 155…243 cm.sq. at the level of 17,4% for monosilicon solar cells and 15,5% for multisilicon solar cells which corresponds to the level of the best world analogues.