Rafalskyi D. Generation of flows of ions and electrons from the RF inductively coupled plasma discharge using single-grid extraction system

Українська версія

Thesis for the degree of Candidate of Sciences (CSc)

State registration number

0411U001814

Thesis Registration Form

0411U001814.pdf

Applicant for

Rafalskyi Dmytro Vyacheslavovych

Specialization

01.04.08 - Фізика плазми

Date of defense

11-03-2011

Specialized Academic Board

Д 64.051.12

V.N. Karazin Kharkiv National University

Essay

In the dissertation work processes of ion and electron flows forming from the ICP using single-grid extraction system have been investigated, interaction between ICP and ion-beam plasma through the extraction system, problems of RF power coupling in ICP and combined inductive-capacitive discharges have been researched. For these aims massive experimental measurements have been carried out, also theoretical models finding in good agreement with experiments have been developed.

Thesis supervisor

Dudin Stanislav Valentynovych

Official opponents

Шамрай Костянтин Павлович
Ткаченко Віктор Іванович

Files

aref.doc

dis.doc

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