Silkin M. The formation and diagnostics of ion beams for surface modification ion-beam techniques

The thesis is devoted to develop the methods of the ion beams formation and diagnostics of ion im-plantation and as well as for the ion-beam assisted deposition process. The dynamics of the particle beam-plasma stream injected in the anode with an expander of the ion source was investigated by numerical PIC - Particle-in-Cell simulation. The wide ion source with stable parameters has been investigated and im-plemented. The beams of gas, metal ions and their mixtures has been formed. Using of the developed uni-versal controller with switching power supply of the discharges allowed to obtain beams with a pro-grammed ratio of gas and metal ions in the pulse. Firstly, the dependencies of acoustic emission (AE) in-tensity, total AE and AE signal amplitude distribution has been investigated via dose implantation of ni-trogen ions N of WC-6Co alloy. Based on the above-described studies firstly the radiation-acoustic method for diagnostics of the ion-beam surface processing of materials and an ion beam parameters has been proposed and implemented as the alternative to the electric method. The monitor of wide ion beams has been created and the standard methods of beam diagnostics and ion-beam processing have been en-hanced.