Nagorny D. Determination of plasma parameters of HF ion source by probe and microwave diagnostics

Value and plasma density distribution have been measured for a HF discharge without a magnetic field in a volume of the discharge chamber at operating modes of the ion source. A ring-like surface distribution of plasma density under an inductor is proved and a radial distribution function of this plasma formation is obtained. Outside the inductor plasma has a maximum of radial density distribution in a center of the chamber. Axial density profile is considerably nonuniform. Plasma density is decreased exponentially as distance from the inductor increases. Density of argon and helium plasma of HF source with a superimposed external magnetic field is studied. Effect of resonant growth of plasma density at certain induction of magnetic field is detected. Density growth can be a result of excitation of eigenmodes of limited magnetoactive plasma.