Zazerin A. Active filters based on thin film piezoelectric resonators

The dissertation is devoted to the development of new frequency selection devices based on active elements and thin-film piezoelectric resonators for frequency range of 0,1..10 GHz, which combine superior electrical and performance characteristics as well as the standard IC technology integration ability. The simulation of the FBAR was carried out using finite element method and broadband resonator model was developed. The model is suitable for simulation the electrical characteristics of membrane-type and Bragg-reflector type structures. The modified OTA macromodel was developed which included nonlinear amplification section based on Chebyshev polynomials and also nonlinear thermal and flicker noise sources. It was shown that active filter links with tunability over 200% can be developed using the reactance simulators. The presented effect can be used to reduce the filter size. The filter synthesis procedure was developed based on LC prototypes replacing with the active resonator analogs, which provide improved performance due to high initial quality factor and stability of the passive subcircuit. The implementation of this approach was shown on examples of small-sized LPF and HPF based on FBAR.