Aksyonov D. Improvement of functional characteristics of plasma filters for multicomponent film deposition

Research object - arc film deposition using filters; aim - development of hardware-software complex for designing filters with predictable properties and for evaluation of already created filters; methods - mathematical modeling, experiment, X ray fluorescence analysis; results - the properties of macroparticle traps and their construction laws were determined, nonuniformity of TiAlN films thickness was decreased 11.5 times and composition - 14.5 times; novelty - methods for enhancing multicomponent coatings uniformity and their composition adjustment were proposed, multichannel probe with its operation software were developed for fast analysis of plasma behavior inside ducts; implementation degree - educational process in V.N. Karazin Kharkiv National University, design and tuning of vacuum arc devices in National Science Centre "Kharkiv Institute of Physics and Technology"; industrial sector - nuclear power plants.