Aksyonov D. Improvement of functional characteristics of plasma filters for multicomponent film deposition

Українська версія

Thesis for the degree of Candidate of Sciences (CSc)

State registration number

0416U005477

Applicant for

Specialization

  • 05.03.07 - Процеси фізико-технічної обробки

11-11-2016

Specialized Academic Board

Д 64.062.04

National Aerospace University "Kharkiv Aviation Institute"

Essay

Research object - arc film deposition using filters; aim - development of hardware-software complex for designing filters with predictable properties and for evaluation of already created filters; methods - mathematical modeling, experiment, X ray fluorescence analysis; results - the properties of macroparticle traps and their construction laws were determined, nonuniformity of TiAlN films thickness was decreased 11.5 times and composition - 14.5 times; novelty - methods for enhancing multicomponent coatings uniformity and their composition adjustment were proposed, multichannel probe with its operation software were developed for fast analysis of plasma behavior inside ducts; implementation degree - educational process in V.N. Karazin Kharkiv National University, design and tuning of vacuum arc devices in National Science Centre "Kharkiv Institute of Physics and Technology"; industrial sector - nuclear power plants.

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