Kovalenko O. Increase of operational properties of thin-film coatings by thermal treatment and ion implantation

The thesis is devoted to the study of the structure of surface nanolayers formed by the ion-plasma method with the help of an integrated approach to achieve the necessary magneto-optical properties of devices for various purposes. As a result of ion-beam deposition, amorphous paramagnetic films are formed on the surface of substrates based on the data of the Conversion electron Mössbauer spectroscopy. The results of the research of formation of magnets structures for devices on the example of iron yttrium garnet are considered. Theoretical and experimental results on the causes of development in magneto-ordered environments, with their obtaining, of parametric instability, which are characterized by chemical heterogeneity and structural-phase state on the thickness of the film and the transition layer with it to the substrate, are given. In order to ensure the consumer properties of the coatings, an alternating elemental composition of YIG films was explored, which was evaluated on the basis of experiments and calculations of changes in the coefficients of their diffusion in the zones of stationary growth. The comparison of the obtained values of the diffusion coefficients was significantly lower than those given in the literature sources typical for massive polycrystalline samples. The necessity of annealing of the substrate in the oxygen-containing atmosphere is shown for elimination of the amorphous layer formed after cutting the plates of GGG. In addition, the need for heat treatment of the substratefilm systems is due to get magneto-ordered state of ferrites. The paper gives recommendations on the optimal parameters for obtaining such coatings for industrial needs.