Povkh M. Natural aging of ion-implanted layers of epitaxial films and garnet single crystals.

Using the method of two-crystal X-ray diffractometry and statistical dynamic theory of X-ray scattering, the regularities of the restructuring of the crystal structure implanted by ions He+, B+ and F+ epitaxial films and garnet single crystals at ion implantation and natural aging were established in the work. Ratios which allow to take into account anisotropy in the orientation of prismatic clusters, for the calculation of the static Krivoglaz-Deby-Waller factor and the extinction coefficient have been obtained. It is established that the natural aging of the nearsurface disturbed layers of epitaxial films and garnet single crystals implanted by ions He+, B+ and F+ is characterized by two stages. They are manifested in the increase of maximum defor¬mation in the first stage of aging and the next decrease of deformation along the entire thickness of the disturbed layer. The influence of the elastic deformation of the hetero¬structure on the degree of disordering of the nearsurface layers at ion implantation, the appearance of strain profiles and the processes of natural aging of ion-implanted ferrite garnet films at room temperature is shown. It has been established that changes of the structure of the nearsurface layers of LaGa- iron itrium garnet films during the natural aging after implantation by F+ ions and laser annealing depend on whether the laser irradiation was carried out from the side of the implanted layer or the side of substrate. Unlike laser radiation from the implanted layer, natural aging (which was going on for over a 7 years) of the sample laser-annealed from the substrate does not lead to a noticeable change in the maximum deformation value, which indicates the efficiency of laser annealing to ensure the thermal stability of ion-implanted ferrite garnet films.