Puzikov V. Formation conditions, structure and properties of diamondlike carbon films deposited from ion beams

Object of investigation: diamond-like carbon films. Purpose of investigation: determination of mechanisms of formation of structures, substructures, nanostructures and caused by them peculiar features of the electron structure and physical properties of diamond-like carbon films with high content of sp3 phase. Investigation methods: films deposition from ion beams, electron microscopy, simulation, optical spectroscopy, Auger-spectroscopy, Raman spectroscopy, ellipsometry, electrophysical measurements Theoretical and practical results, novelty: a method of carbon film deposition from the separated by mass ion beam has been suggested for the first time. This allowed to prepare films with high (>90%) content of sp3 phase, to provide their structural and phase homogeneity, to find a correlation between structure, substructure, phase composition, physical properties of films and conditions of their deposition. New principles of constructing structure models of films with high content of sp3 phase have been proposed. Field of application: devices for electronics, optics and cybernetics