Denysenko I. Spatial and spatially averaged parameters of low-ionised gas discharge plasmas at low pressures

Properties of low-pressure gas discharges (inductively-coupled; sustained by surface waves (SW) and with dust particles) are studied theoretically. Methods of control of the spatial and spatially averaged parameters of the discharges are proposed. Hydrodynamic models of the plasma columns sustained by SW are developed. The models account for the thermal heat flux of electrons. We also studied effects of external conditions on radial distribution of ion flux density near chamber bottom in inductively coupled plasma sources. Properties of an Ar/CH4/H2 inductively coupled plasma, used for carbon nanostructure deposition, were investigated. Hydrodynamical and kinetic theories of gas discharge plasmas with dust particles were developed. It was determined how the submicron and nano-sized dust particles affect parameters of low-pressure gas discharges. It was shown that in electronegative plasmas the negative ion drag force may me about the same order with other forces affecting dust particles.