Kanashevich G. Technological hases of quality control materials surface layer at electronic-beam microtreatment.

On the basis of theoretical and experimental researches technological principles of electronic-beam microtreatment of optical materials with the aim of creation of defect-free, optically homogeneous multifunctional surfaces and layers for making such microelements as focusings and dispersive lenses, reflecting, refractive, diffusive-reflecting coverages, boards of optical integrated circuits, optical waveguides, lens rasters, which are used in exact instrument engineering, are developed Main points concerning the mechanism of formation of micro- and nanoindexes of optical surfaces, according to which formed monolithic defect-free surface layer and surface topography are the result of combined thermal and electric influence of electron flow, melt material volatility in a vacuum and material guided cooling, are formulated. For the first time complex technological system for realization of the process of electronic-beam microtreatment of optical material surface layer, directed on the improvement of quality, durability, service reliability of optical elements is developed Technological possibilities of electronic-beam treatment of optical materials by band electronic flow from one operation (polishing) to ten operations, notably: surface activation, surface layer refining, removal of defective and cracked layers, diminishing of surface roughness, creation of blocking layers for ion exchange, bulge forming, film elements treatment, surface silicification, formation of surface layers with modified refractive index, delamination of juvenile surfaces are expanded. Technical solutions concerning the formation of separate optical microelements, functional layers, separate pieces of equipment are suggested, adaptive system of electronic-beam microtreatment of optical materials is created and the principle of its management is developed.