Borovytsky V. Spatial super-resolution in the optical microscope with spatial modulation of illumination

The thesis is devoted to the solution of the scientific problem of overcoming the diffraction limit and reaching the spatial super-resolution in an optical microscope for observation of non-transparent specimens in reflected light. The problem is solved by conjugation of the spatial modulation of illumination in form of an image of a transparent on a specimen surface, the optimal linear filtering and the digital demodulation. The improved mathematical model of a microscope optical-electronic tract is made for investigation of the process of digital image forming. The new method for demodulation which is based on the automatic measurements of modulation spatial frequency and phase and the separate demodulation along orthogonal coordinate axis's is proposed. The recommendations for selection of the optimal parameters of an optical microscope are formulated. The results of experimental studies of the optical microscope with spatial super-resolution in observation of non-transparent specimen in reflect light are presented. Key words: optical microscope, spatial resolution, spatial modulation of illumination, digital filtering, digital demodulation.