Baranov O. Scientific basis of formation of distribution of ion fluxes with specified parameters in setups of plasma-ion treatment of surfaces

The subject is a phenomenon of influence of the magnetic field on the ion currents in technological devices for plasma ion processing; the purpose is to increase the efficiency of plasma ion processing by forming a distribution of ion fluxes; the research methods and equipment include analysis and synthesis of technological processes of plasma ion processing based on computer simulations of the plasma generation in the magnetic field of arched configuration and interaction of the plasma with magnetic traps with the configuration of the magnetic bottle; the experimental studies were carried out with the use of plasma setup "Bulat-6", and microscopes MIM-7, Neophot 30 ZEISS, "REM-106" and BMI-1C; the theoretical and practical results are the first time proposed method of forming the ion flux distribution by the system of magnetic traps for electrons in the plasma, which makes it possible to process the surface of the 400 mm diameter, the ion cleaning rate increased to 20 times, the rate of deposition - to 2-5 times; the novelty includes the developed principles of functioning of devices with an arched magnetic field, which is rational to form the distribution of the ion fluxes at generation of the plasma by use of the surface; the proved method of use the magnetic bottle configuration with mirrors at the plasma source and the surface, which is rational for forming the flows from the external plasma source; the developed theory of discharge ignition considering the influence of the magnetic field; the developed theory of steady state magnetron discharge; the developed theoretical basis of the formation of the distribution of ion fluxes for the surface treatment by use of the external source plasma; Introduction stage - the high performance device is introduced in the state-run enterprise "FED" for the deposition of coatings with equal thickness on carbide inserts, and the results are introduced in the educational process of the National aerospace university "KhAI"; the industrial sector is mechanical engineering.