Zykov O. Generation and transport of ion fluxes in the plasma systems with combined electric and magnetic fields.

The thesis is devoted to experimental and theoretical study of ion beams generation and transport in plasma systems with combined electric and magnetic fields, which are widely used in the surface engineering plasma technologies . The ignition processes and integral characteristics of gas discharges are studied in devices with the combined electric (DC, radio-frequency, potential and vortex) and magnetic (DC, AC) fields on the base of planar magnetron discharge in the accelerating and plasma modes, inductively coupled discharge, combined inductive-capacity and inductive-magnetron discharges. Systematization of generation and transport processes of ion beams were carried out for plasma systems with different combinations of EH fields. On the basis of drift theory and the conservation laws of particles, impulse and energy the general parameters of similarity and regularities of ion-plasma systems with combined EH fields have been investigated.