Romashchenko O. Dynamics and phase states of macroparticles in the beam-plasma systems.

The thesis is devoted to the theoretical study and numerical modeling of the interaction of macroparticles with the low-temperature plasma of the low pressure in the presence of the electron or ion beams. The processes of the macroparticle charging in the plasma with electron (ion) beam, the processes of the energy exchange between the macroparticle and the plasma with electron (ion) beam, that influence the dynamics and phase states of the macroparticles in the beam-plasma systems, are considered. The dynamics and phase states of the macroparticle in the plasma of the vacuum arc discharge are investigated under conditions, which are relevant to different plasma processing such as vacuum arc deposition of the thin film, plasma immersion ion implantation, and reactive vacuum arc deposition. The thesis focuses on the methods of the plasma purification from macroparticles. The main attention is paid to the alternative methods of reducing the macroparticles contaminations in coatings without applying any magnetic filters.