Polozhij K. The Charged Partical Flow Formation in Combined Inductive-Capacitive RF Discharge

Українська версія

Thesis for the degree of Candidate of Sciences (CSc)

State registration number

0401U001613

Thesis Registration Form

0401U001613.pdf

Applicant for

Specialization

  • 01.04.08 - Фізика плазми

20-04-2001

Specialized Academic Board

Д 64.051.12

V.N. Karazin Kharkiv National University

Essay

Dissertation is devoted to research of charged particle flow formation in inductive-capacitive RF discharge. It is developed the power distribution model. It is obtained, that a power maximum exist on acceleration of ions on electrode. The model of inductively coupled discharge is developed. The dimensions of sheath layers is taken into account. The dependence of pressure and power for discharge shutdown is obtained. The parameters correlation for a maximum process effectiveness of sputtering for systems on the basis of combined discharge has been obtained.

Read more

Similar theses

0422U100085

Kudin Dmytro Viktorovych

Low-temperature nonequilibrium plasma-chemical processes in a barrierless gas discharge of atmospheric pressure in air with hydrocarbon admixture

0522U100055

Olshansky Valentyn V.

Parametric kinetic instability and plasma turbulence in gas discharges and thermonuclear devices.

0421U103011

Leleko Yakiv Feliksovich

Physical phenomena in the sheath at the boundary of weakly ionized plasma

0421U102858

Tyshchenko Margaryta H.

Propagation of Alfven waves and energy transfer across magnetic surfaces in toroidal plasmas.

0521U101607

Romashchenko Olena Volodymyrivna

Dynamics and phase states of macroparticles in the beam-plasma systems.