Kalyuzhnaya A. Peculiarities of plasma kinetics in a glow discharge in multicomponent gas mixtures.

The thesis deals with investigations of plasma kinetics in a glow discharge in multicomponent mixtures of various compositions. Numerical simulation of the discharge and radiation kinetics in excimer gas-discharge KrF and ArF lasers makes it possible to establish the optimal quantitative composition of the active media and the optimal mixture pressure, to investigate the dependence of the radiation energy and efficiency on the magnitude of the charging voltage. The differences of the optimal parameters of the active media of KrF and ArF lasers as well as the influence of a buffer gas (helium or neon) on the discharge and radiation kinetics are studied. Consistent simulation of plasma kinetics in excimer lasers and the electric pumping circuit gives a possibility to optimize the parameters of the latter. This results in an increase of the effectiveness of laser generation by a factor of 1.5-2. The discharge and radiation kinetics in the active medium of an excimer XeCl laser with a halogen-containing gas Freon-12 instead of toxic HCl is numerically simulated for the first time. It is shown that such replacement does not result in a decrease of the generation effectiveness, that's why Freon-12 can be used for manufacturing a competitive XeCl laser based on a low-toxic chemically inert mixture The electron energy distribution functions (EEDF) in mixtures of nitrogen with electronegative gases in a hollow-cathode glow discharge are investigated. It is shown that a stationary inversed EEDF with an increased number of electrons in the inverse region can be formed in the mixtures N2:SF6 and N2:CCl4.