Yaganov P. Microelectronic transducers in silicon structures with dielectric insulation

The dissertation is devoted to development of high-sensitive integrated microelectronic sensors in silicon structures with dielectric insulation (SSDI), and to design, based on these structures, of new measuring transducers of non-electric quantities (TNEQ) with wide functional abilities. In the course of theoretical and experimental investigations described in this thesis, a new multi-sensor SSDI was developed, and peculiar features of its operation and metrical characteristics were studied. The structure was used as the kernel in newly created instrumental TNEQ with wide functional abilities. Development of methods of simulation of metric characteristics of the sensors has been continued. For high-precision approximation of metric characteristics, the regression analysis and algorithms of neural networks were used.