Volynyuk D. Technology of semiconductor heterostructures on the basis of organic and non-organic materials for electro-optical elements of microelectronics

Object of investigation - technological methods of heterostructure on the base of organic and inorganic materials creation and optical, electro-optical, electro-physical and photogeneration effects in its with the aim of creation of electro-optical elements of microelectronics. Methods of investigation - creation technology development of organic semiconductor and conjugated polymer nanoscale films on the base of thermovacuum deposition method, as functional part of photosensitive heterostructures for a electro-optical elements, and complex investigation of its structural, electro-physical and electro-optical properties. Methods of investigation - impedance spectroscopy, laser ellipsomertry, volt-ampere and volt - faradic characteristics, optical spectroscopy, infra-red spectroscopy with an Furrier transmit, atomic force microscopy. Theoretical and practical results - heterostructure ITO/DiMe-PTCDI/pentacene/Al, PЕТ/ITO/PEDOT:PSS/pentacene/Al on a flexible substrate created and the conductive polymer PEDOT:PSS used as a rectified contact to the ZnSe. New - the technology of thermovacuum deposition of nanoscale thin films of conductive polymers polyorthometoxyaniline and polyorthotoluidine, the technology of stage by stage thermovacuum deposition of nanoscale films of organic semiconductors pentacene and DiMe-PTCDI with an aim of creation of ITO/pentacene/DiMe-PTCDI/Al were developed. The degree of application - the theoretical suggestion are applied to practices. The field of application - electro-optical elements of microelectronics.