Pazukha I. Physical processes in sensing element, temperature, strain and pressure sensors

Українська версія

Thesis for the degree of Candidate of Sciences (CSc)

State registration number

0409U003086

Applicant for

Specialization

  • 01.04.01 - Фізика приладів, елементів і систем

12-05-2009

Specialized Academic Board

Д 55.051.02

Sumy State University

Essay

The physical processes in temperature, gauge and pressure sensors sensing elements on the base of thin film systems Cu/Cr, Fe/Cu, Fe/Cr and Аg/Cu was studied. The method of estimation interface scattering contribution in resistivity, temperature coefficient of resistance and gauge factor total value was proposed. Sensing element of pressure sensor оn the base of thin film structures Cu/Cr и Fe/Cr was proposed. Electron and sensor instrumentation.

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