Zadorozhniy R. Models and improve the accuracy of measurement of geometrical size of the object probe microscope

The thesis is dedicated to scientific and technical research problems and create new methods and models for improving of the accuracy of measuring the geometrical dimensions of objects in scanning probe microscopes view 1nm range to 1000 nm. The process of interaction with the sample probe, and developed a mathematical model equation for measurement of the atomic force microscope, which takes into account errors that occur during interaction probe and sample. The problem of moving the probe at the edge of the axis tilt scanning probe microscope, received a mathematical model of influence. The effect on accuracy. Improved method of adjusting parameters neortohonalnosti scanner which is based on the distribution voltage level, attached to a surface scanner and allows the procedure to re-correction scanner coordinates X, Y and Z without interference in its construction. Scanning method is developed which allows measuring the parameters of the surface with an angle less than the side wall performance angle aperture probe.