Yeryomin S. Mass-spectrometry of neutral particles sputtered by ions with energies up to 170 keV

Українська версія

Thesis for the degree of Candidate of Sciences (CSc)

State registration number

0411U000139

Thesis Registration Form

0411U000139.pdf

Applicant for

Specialization

  • 01.04.01 - Фізика приладів, елементів і систем

24-12-2010

Specialized Academic Board

Д 55.051.02

Sumy State University

Essay

The thesis is devoted to the development, research of the characteristics and optimization of parameters of the experimental equipment for research of the ion sputtering processes in the range of primary ion energies up to 170 keV using secondary neutral mass-spectrometry technique, as well as the development of appropriate research methodologies. The new experimental data on the emission of neutral copper clusters and the process of preferential sputtering of molybdenum isotopes in the energy range of primary ions of argon from 30 to 170 keV are obtained. Application of the results: ion-beam technology, physics of ion sputtering.

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Files

Aref.doc

Diss.doc

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