Evsyukov A. The inverted cylindrical magnetron discharges and their applications

A system plasmadynamic approach to the description of physics of a cylindrical inverted magnetron gas discharge is proposed for the first time. The proposed approach allows one to reduce the description of physics of a cylindrical magnetron gas discharge to a simple plasmaoptical model based on the fundamental principles of electron magnetic insulation and equipotentialization of magnetic field lines. The proposed theoretical model was used as a basis for the improvement of a cylindrical plasmaoptical magnetron. The results of experimental study of the basic plasmadynamic and electro-physical properties have supported the conclusions of the proposed theoretical model of the magnetron discharge. In the framework of the modified S. Berg model, it is shown that the behavior of the reactive magnetron deposition process significantly depends on the surface atom mobility in deposited films. The emission optical spectrum of plasma of a cylindrical technological inverted magnetron is investigated. The work also deals with the analysis of the main physical processes which determine the character of atomic radiation in various regimes of the discharge (the regimes of synthesis of titanium films and its binary compounds TiN and TiO2).