Marusenkova T. Semiconductor magnetic sensors based on splitted Hall structures.

The work is devoted to enhancement of galvanomagnetic sensors based on semiconductor splitted Hall sensors (SHS) and further development of their scientific basis. It was developed a complex approach of mathematical modeling of SHS that includes schematic and structural analysis using commonly well-known specialized software - SPICE, FEMLAB and MATLAB. Upon the results of performed parametric analysis of experimental data and mathematical modeling we determined the main reasons of non-ideality of output signals of SHS with corner sensitive region, two-dimensional scanner based on SHS and tree-dimensional sensor based on four-contact SHS. It was detected that on contrast to traditional Hall plates structural asymmetry of SHS leads not only to considerable off-set increase but also to considerable increase of their output signals nonlinearity and parasitic cross-sensitivity. As the result of the work parameters of magnetic sensors based on the said SHS were improved and their calibration methods were developed. Besides, signal transducers and software of sensors based on SHS that meet requirements SHS and modern microelectronics were developed. All proposed solutions are verified using test samples of magnetic sensors.