Savitskiy A. Radiomeasuring humidity transformers based on MDS-structures

The research object is the process of converting of the of radiomeasuring devices into frequency signal according to the functional relation; The reserch purpose is sensitisation of the radiomeasuring devices of the clean room's humidity for the microelectronic industry, based on autogenerating structures with negative resistance and humidity-sensitive MOSFET as a primary sensing element; research methods are based on using of the physical electronic's equation; theory of the state variables, theory of complex variable; theoretical results - the development of theory's elements of the humidity interaction with sensing MOSFETs, containing the porous SiO2 layer as a gate dielectric. A theoretical investigation of the humidity's influence on impedance and parameters of the equivalent scheme's elements and humidity-sensitive MOSFET's boundary frequency. Identifying the theoretical possibility of improving noise immunity and sensitiveness of the measurement of the clean room's humidity, using radiomeasurement transformators based on MOS-structures; practical results - creation of the calculation methods of the sensor's parameters based on two-gate MOSFETs with gate dielectric porous layer; radiomeasurement device's development for the measurement of the clean room's humidity; the development of the calculation programs of the humidity depending on the frequency of the device's signal. The results of dissertation research are introduced in research institute of indicator devices "Helium" (Vinnytsia) and in an educational process at the study of the special course the "Sensors of the physical values". The application field are enteprises of electronic industry.