Kost Y. Technology for growing the microwhiskers of InAs1-xSbх solid solution for galvanomagnetic sensors

Українська версія

Thesis for the degree of Candidate of Sciences (CSc)

State registration number

0413U004823

Applicant for

Specialization

  • 05.27.06 - Технологія, обладнання та виробництво електронної техніки

25-06-2013

Specialized Academic Board

Д 35.052.13

Lviv Polytechnic National University

Essay

Thesis addresses the technology issues of obtaining InAs1-xSbx solid solution microwhiskers. The developed technology ensures free crystallization of the solid solution from vapour phase without a lattice-matched substrate. The method is characterized with (i) the generation of nanowhisker arrays in kinetic mode aided by vapour-liquid-solid (VLS) mechanism, (ii) ensuring the technological conditions for nanowhiskers' competitive growth by Ostwald ripening, (iii) the epitaxial overgrowth of nanowhiskers up to microwhisker sizes in diffusion mode. Oxygen in vapour phase has been revealed to contribute into repeatable forming of nanowhisker arrays in kinetic mode of their growth; its optimal composition has been determined to equal several ppm. A set of technological equipment has been designed and produced; it allows implementing a two-stage technology of growing the InAs1-xSbx solid solution whiskers in closed and open-tube systems. The capability of the developed technology to produce nano- and microwhiskers of InAs1-xSbx solid solution with various component ratios is demonstrated. Subjecting InAs1-xSbx solid solution whiskers to X-ray analysis of their crystal structure has made it possible to determine the correlation between the lattice parameters and their components ratio. The studies of the grown whiskers' electrophysical parameters (free charge carrier concentration, mobility, resistivity), their response to destabilizing factors (temperature, ionizing irradiation) have demonstrated the high potential held by the use of InAs1-xSbx solid solution whiskers for galvanomagnetic sensors.

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