Shantyr A. Improvement of calibration methods and tools for measuring scanning electron microscopes

The study is dedicated to the improvement of methods and tools for calibration of measuring scanning electron microscope (SEM), which can improve the accuracy of estimates of metrological characteristics (MCh) while SEM calibration for measuring of linear dimensions in the nanorange, particularly in subrange from 10 nm to 100 nm. New method of SEM staged calibration proposed. This makes it possible to exclude subjective component of measurement uncertainty while SEM calibration, to improve the accuracy of SEM MCh estimates and to implement an automatic SEM calibration. Proposed generalized model of measuring signal obtained using SEM, part of which is the measurement, empirical and idealized models, mutual consideration of which allows to obtain accurate estimates of SEM MCh and to calculate their extended uncertainty. The method of estimation of extended uncertainty of SEM MCh estimates. Proposed usage of speed of propagation of surface acoustic waves for reproduction of length. Developed standard sample to calibrate the SEM in nanometer range.