Rudnits'kyj V. Features of ignition and burning of some discharges of low pressure

In the dissertation the discharges of low pressure (Penning discharge with cold cathodes; diode and triode arc in vapors of the anode with heated of the cathode; the beam-plasma and beam-magnetron discharges with evaporation of an electrode) were investigated. The explanation of their features of ignition and burning represented the purpose of research. The definition of concentration, temperature of charged particles and potential of plasma was realized by a flat Langmuir probe, multigrid analyzer of charged particles. Zones of astable burning of the discharge in a Penning cell is revealed and explained. The influence of an inlet of gas on the discharge with evaporation of the anode is investigated. A research sample of a plasmachemical reactor of synthesis of thin films of oxides, hydrides, nitrides and other compounds of a wide class of metals on metal, semiconductor and dielectric substrates is created on the basis of diode and triode arc in vapors of the anode. It has advantages in comparison with devises on the basis of a method of condensation with ion bombardment, for example, "Bulat": macroparticle-free plasma flows, wider choice of working substances, which evaporate. The plasmachemical reactor is especially effective in case of thin high-adhesive films in an electronics, electrical technology, micromechanics and other technologies, where the drops of working substance in synthesized films are not supposed.