Bobro V. Main ways of achieving maximum capabilities of the ellipsometry method

Українська версія

Thesis for the degree of Candidate of Sciences (CSc)

State registration number

0499U002434

Thesis Registration Form

0499U002434.pdf

Applicant for

Specialization

  • 01.04.01 - Фізика приладів, елементів і систем

23-09-1999

Specialized Academic Board

Д 55.051.02

Sumy State University

Essay

Ellipsometry. The investigations follow three principal directions. It is shown how to overcome problems encountered in the implementation of the one-zone procedure in ellipsometry measurements. New well-grounded ellipsometry metrology is presented based on the onezone procedure. A scheme is described for the metrology operation. The techniques are proposed for the solution of the inverse problem in ellipsometry. The statistical approach to the solution of the ellipsometry incorrect inverse problem for ultrathin films which includes new criteria for the choice of the optium point is shown to provide reliable data permitting surface film ranging from 2 to 10 nm to be examined.

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