Oksanych A. Methods and instrumentation of structurally geometrical perfection of semiconductor materials and structures in requirements of their serial production.

Українська версія

Thesis for the degree of Doctor of Science (DSc)

State registration number

0502U000356

Thesis Registration Form

0502U000356.pdf

Applicant for

Specialization

  • 05.27.06 - Технологія, обладнання та виробництво електронної техніки

25-09-2002

Specialized Academic Board

Д 64.052.03

Kharkiv National University Of Radio Electronics

Essay

The dissertation is devoted to the development of scientifically-approved methods for the strains control, mechanical voltages, of structural perfection and making measuring andd growth inventory constructing principles on their basis. allwing to control semiconductor plates and structures at all stages and also making of instrumentation for semiconductor crystals structural perfection control during propagation for destructive method.

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Files

AREF.DOC

DIS.doc

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