Lisovskiy V. Gas discharge of low pressure in combined electric fields.

Українська версія

Thesis for the degree of Doctor of Science (DSc)

State registration number

0508U000527

Thesis Registration Form

0508U000527.pdf

Applicant for

Specialization

  • 01.04.08 - Фізика плазми

03-10-2008

Specialized Academic Board

Д 64.051.12

V.N. Karazin Kharkiv National University

Essay

The similarity law is obtained for RF gas breakdown. A novel method is proposed for determining the electron drift velocity. With this method the electron drift velocity values are determined in ten gases. The RF discharge in SF6, NF3 and SiH4 is found to exist in weak-current mode, strong-current mode and dissociative mode. Three modes of the dual-frequency discharge are shown to exist: non self-sustained RF discharge perturbed with LF electric field; combined discharge; non self-sustained LF discharge perturbed with RF electric field.

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Files

Aref.doc

Диссер.doc

Диссер.doc

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