Palagin V. Methodological foundations of technology components Microelectromechanical systems

Object - microelectromechanical system (MEMS) components production processes. Aim -to increase efficiency of MEMS components production processes design. Methods - mathematical methods of similarity theory and dimensions of quantity; electromechanical analogies in mathematical models of MEMS components; matrix-vector operations and Markov processes; Bayesian statistical decisions for selection between alternative processes and identification of transition probability function; conjugate probability distributions to facilitate recalculation of yield of valid products; theory of stress and strain state of MEMS materials and elements; computer-aided design (CAD) system. Results - it is proposed to estimate, using methodological foundations, the convergence of unusual physical phenomena in microminiaturized products; for the first time a method and a technology is proposed to create MEMS of multipost connecting devices to control electrical parameters of multilayer switching structures; development of the method to control the component electrophysical parameters in the setting of various combinations of forces acting in MEMS; development of the method to predict and calculate the yield of valid MEMS components using basic design elements. Implementation - into scientific practices and academic activity at NURE, Instrument-Making Research Technological Institute, СКБ EDB "Polisvit" of State Scientific Production Enterprise "Communar Corporation", "Kharkiv Research Institute of Mechanical Engineering", Research-and-Production Firm "West Labs Ltd.", TRIOL Corporation of "Vertikal" Scientific and Production Association, "Titan Machinery Limited". Application - design of MEMS components production processes